Inventor
WIJARANAKULA WITAWAT
US9 patents
⚠️ This page may combine multiple inventors who share the name “WIJARANAKULA WITAWAT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEH AMERICA INC
6 patentsUS5611855AMar 18, 1997
Method for manufacturing a calibration wafer having a microdefect-free layer of a precisely predetermined depth
SEH AMERICA INC131 citations97
US6022793AFeb 8, 2000
Silicon and oxygen ion co-implantation for metallic gettering in epitaxial wafers
SEH AMERICA INC84 citations95
US5865887AFeb 2, 1999
Method for improving mechanical strength of the neck section of czochralski silicon crystal
SEH AMERICA INC23 citations92
US5961713AOct 5, 1999
Method for manufacturing a wafer having a microdefect-free layer of a precisely predetermined depth
SEH AMERICA INC27 citations91
US5629216AMay 13, 1997
Method for producing semiconductor wafers with low light scattering anomalies
SEH AMERICA INC54 citations86
US6569749B1May 27, 2003
Silicon and oxygen ion co-implanation for metallic gettering in epitaxial wafers
SEH AMERICA INC12 citations73