Inventor
IMOTO YUKIO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “IMOTO YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
4 patentsUS5679059AOct 21, 1997
Polishing aparatus and method
EBARA CORP110 citations98
US5704827AJan 6, 1998
Polishing apparatus including cloth cartridge connected to turntable
EBARA CORP67 citations95
US6500051B1Dec 31, 2002
Polishing apparatus and method
EBARA CORP25 citations92
US7708618B2May 4, 2010
Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
EBARA CORP0 citations50