P

Inventor

HIMUKAI KAZUAKI

JP5 patents
⚠️ This page may combine multiple inventors who share the name “HIMUKAI KAZUAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EBARA CORP

3 patents
US5679059AOct 21, 1997

Polishing aparatus and method

EBARA CORP110 citations98
US5704827AJan 6, 1998

Polishing apparatus including cloth cartridge connected to turntable

EBARA CORP67 citations95
US6500051B1Dec 31, 2002

Polishing apparatus and method

EBARA CORP25 citations92

TOSHIBA KK

2 patents
US6997782B2Feb 14, 2006

Polishing apparatus and a method of polishing and cleaning and drying a wafer

TOSHIBA KK16 citations92
US7198552B2Apr 3, 2007

Polishing apparatus

TOSHIBA KK2 citations62