Inventor

KERNS RALPH C

US2 patents

⚠️ This page may combine multiple inventors who share the name “KERNS RALPH C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

1 patent

US7320942B2Jan 22, 2008

Method for removal of metallic residue after plasma etching of a metal layer

APPLIED MATERIALS INC19 citations92

LAM RES CORP

1 patent

US5737175AApr 7, 1998

Bias-tracking D.C. power circuit for an electrostatic chuck

LAM RES CORP69 citations89