Inventor
ARUGA YOSHIKI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “ARUGA YOSHIKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANELVA CORP
4 patentsUS6251232B1Jun 26, 2001
Method of removing accumulated films from the surface of substrate holders in film deposition apparatus, and film deposition apparatus
ANELVA CORP64 citations95
US5846328ADec 8, 1998
In-line film deposition system
ANELVA CORP137 citations94
US6027618AFeb 22, 2000
Compact in-line film deposition system
ANELVA CORP49 citations92
US5560586AOct 1, 1996
Main valve
ANELVA CORP20 citations91