Inventor
ORCZYK MACIEK
US7 patents
Patents
7 patentsUS6217658B1Apr 17, 2001
Sequencing of the recipe steps for the optimal low-dielectric constant HDP-CVD Processing
APPLIED MATERIALS INC886 citations98
US6136685AOct 24, 2000
High deposition rate recipe for low dielectric constant films
APPLIED MATERIALS INC343 citations98
US5937323AAug 10, 1999
Sequencing of the recipe steps for the optimal low-k HDP-CVD processing
APPLIED MATERIALS INC935 citations98
US5661093AAug 26, 1997
Method for the stabilization of halogen-doped films through the use of multiple sealing layers
APPLIED MATERIALS INC354 citations98
US6070550AJun 6, 2000
Apparatus for the stabilization of halogen-doped films through the use of multiple sealing layers
APPLIED MATERIALS INC44 citations92
US6375744B2Apr 23, 2002
Sequential in-situ heating and deposition of halogen-doped silicon oxide
APPLIED MATERIALS INC17 citations91
US6228781B1May 8, 2001
Sequential in-situ heating and deposition of halogen-doped silicon oxide
APPLIED MATERIALS INC25 citations91