Inventor
OZARSKI ROBERT G
US13 patents
⚠️ This page may combine multiple inventors who share the name “OZARSKI ROBERT G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CYMER INC
7 patentsUS6128323AOct 3, 2000
Reliable modular production quality narrow-band high REP rate excimer laser
CYMER INC284 citations99
US5991324ANov 23, 1999
Reliable. modular, production quality narrow-band KRF excimer laser
CYMER INC196 citations98
US6067306AMay 23, 2000
Laser-illuminated stepper or scanner with energy sensor feedback
CYMER INC84 citations96
US5978405ANov 2, 1999
Laser chamber with minimized acoustic and shock wave disturbances
CYMER INC68 citations95
US6229639B1May 8, 2001
Multiplexer for laser lithography
CYMER INC45 citations92
US6396062B1May 28, 2002
Portable laser beam monitor
CYMER INC13 citations73
US6111907AAug 29, 2000
Laser chamber installation in and removal from a laser system housing
CYMER INC10 citations73