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Inventor

JASPER JOHANNES C M

NL5 patents
⚠️ This page may combine multiple inventors who share the name “JASPER JOHANNES C M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM LITHOGRAPHY BV

3 patents
US6067146AMay 23, 2000

Photolithographic apparatus

ASM LITHOGRAPHY BV14 citations71
US6239862B1May 29, 2001

Photolithographic apparatus

ASM LITHOGRAPHY BV4 citations60
US5889580AMar 30, 1999

Scanning-slit exposure device

ASM LITHOGRAPHY BV1 citations51

ASML NETHERLANDS BV

2 patents
US6674510B1Jan 6, 2004

Off-axis levelling in lithographic projection apparatus

ASML NETHERLANDS BV192 citations95
US7019815B2Mar 28, 2006

Off-axis leveling in lithographic projection apparatus

ASML NETHERLANDS BV19 citations89