Inventor
DAVIS JR JAMES C
US8 patents
Patents
8 patentsUS6158941ADec 12, 2000
Substrate transport apparatus with double substrate holders
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US5539323AJul 23, 1996
Sensor for articles such as wafers on end effector
BROOKS AUTOMATION INC153 citations98
US6299404B1Oct 9, 2001
Substrate transport apparatus with double substrate holders
BROOKS AUTOMATION INC55 citations96
US5647724AJul 15, 1997
Substrate transport apparatus with dual substrate holders
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US5120019AJun 9, 1992
Valve
BROOKS AUTOMATION INC71 citations95
US4909701AMar 20, 1990
Articulated arm transfer device
BROOKS AUTOMATION INC69 citations91
US5577879ANov 26, 1996
Articulated arm transfer device
BROOKS AUTOMATION INC28 citations90
US5431529AJul 11, 1995
Articulated arm transfer device
BROOKS AUTOMATION INC34 citations90