Inventor

ISAO AKIHIKO

JP18 patents

⚠️ This page may combine multiple inventors who share the name “ISAO AKIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ISAO AKIHIKO

ULVAC COATING CORP

Phase-shifting photomask blank and method of manufacturing the same as well as phase-shifting photomask

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

Phase-shifting photomask blank, phase-shifting photomask, and method of manufacturing them

Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask comprising a semitransparent region

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

Phase-shift photo mask blank, phase-shift photo mask and method for fabricating semiconductor devices

Phase-shifting photomask blank, phase-shifting photomask, method for producing them and apparatus for manufacturing the blank

ULVAC SEIMAKU

Apparatus for forming an inhomogeneous optical layer

Method for forming an inhomogeneous optical layer

Method for forming an inhomogeneous optical layer

Apparatus for forming an inhomogeneous optical layer

RENESAS TECH CORP

Phase shifter film and process for the same

Phase shifter film and process for the same

MITSUBISHI ELECTRIC CORP

Phase shift mask and manufacturing method thereof

ULCOAT ULVAC COATING CORP

Method of manufacturing phase-shifting photomask blank