Inventor
HOEHNSDORF FALKO
DE3 patents
Patents
3 patentsUS6750140B2Jun 15, 2004
Process for producing contact holes on a metallization structure
INFINEON TECHNOLOGIES AG8 citations66
US6869886B2Mar 22, 2005
Process for etching a metal layer system
INFINEON TECHNOLOGIES AG3 citations58
US6864170B2Mar 8, 2005
Compact semiconductor structure
INFINEON TECHNOLOGIES AG1 citations48