Inventor
VISWANATHAN NUNGAVRAM S
US6 patents
Patents
6 patentsUS7144827B2Dec 5, 2006
Poly(organosiloxane) materials and methods for hybrid organic-inorganic dielectrics for integrated circuit applications
SILECS OY22 citations91
US7060634B2Jun 13, 2006
Materials and methods for forming hybrid organic-inorganic dielectric materials for integrated circuit applications
SILECS OY21 citations91
US7256467B2Aug 14, 2007
Materials and methods for forming hybrid organic-inorganic anti-stiction materials for micro-electromechanical systems
SILECS OY16 citations82
US6974970B2Dec 13, 2005
Semiconductor device
SILECS OY9 citations72
US7479462B2Jan 20, 2009
Thin films and methods for the preparation thereof
SILECS OY4 citations61
US7473650B2Jan 6, 2009
Poly(organosiloxane) materials and methods for hybrid organic-inorganic dielectrics for integrated circuit applications
SILECS OY4 citations61