Inventor
YAMADA RENICHI
JP5 patents
Patents
5 patentsUS7450458B2Nov 11, 2008
Dynamic random access memories and method for testing performance of the same
HITACHI LTD10 citations83
US7247890B2Jul 24, 2007
Semiconductor device and manufacturing method thereof
HITACHI LTD10 citations82
US11016138B2May 25, 2021
Diagnosis system for power conversion device, diagnosis method for semiconductor module, and power conversion device
HITACHI LTD2 citations72
US9508611B2Nov 29, 2016
Semiconductor inspection method, semiconductor inspection device and manufacturing method of semiconductor element
HITACHI LTD3 citations71
US9846133B2Dec 19, 2017
Semiconductor inspection device including a counter electrode with adjustable potentials used to obtain images for detection of defects, and inspection method using charged particle beam
HITACHI LTD0 citations41