Inventor
TIAN YUAN A
US4 patents
Patents
4 patentsUS6991528B2Jan 31, 2006
Conductive polishing article for electrochemical mechanical polishing
APPLIED MATERIALS INC45 citations96
US7207878B2Apr 24, 2007
Conductive polishing article for electrochemical mechanical polishing
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US7582564B2Sep 1, 2009
Process and composition for conductive material removal by electrochemical mechanical polishing
APPLIED MATERIALS INC9 citations83
US7210988B2May 1, 2007
Method and apparatus for reduced wear polishing pad conditioning
APPLIED MATERIALS INC9 citations72