Inventor
SURANA RAHUL
US13 patents
⚠️ This page may combine multiple inventors who share the name “SURANA RAHUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS6790768B2Sep 14, 2004
Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects
APPLIED MATERIALS INC13 citations92
US7354332B2Apr 8, 2008
Technique for process-qualifying a semiconductor manufacturing tool using metrology data
APPLIED MATERIALS INC51 citations91
US6960521B2Nov 1, 2005
Method and apparatus for polishing metal and dielectric substrates
APPLIED MATERIALS INC6 citations73
US7848839B2Dec 7, 2010
System, method, and medium for an endpoint detection scheme for copper low-dielectric damascene structures for improved dielectric and copper loss
APPLIED MATERIALS INC1 citations51