Inventor

BELEN RODOLFO P

US3 patents

⚠️ This page may combine multiple inventors who share the name “BELEN RODOLFO P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KATZ DAN

1 patent

US8236133B2Aug 7, 2012

Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias

KATZ DAN13 citations78

BELEN RODOLFO P

1 patent

US8066895B2Nov 29, 2011

Method to control uniformity using tri-zone showerhead

BELEN RODOLFO P18 citations78

APPLIED MATERIALS INC

1 patent

US8017526B2Sep 13, 2011

Gate profile control through effective frequency of dual HF/VHF sources in a plasma etch process

APPLIED MATERIALS INC1 citations50