Inventor
PATERSON ALEXANDER M
US7 patents
⚠️ This page may combine multiple inventors who share the name “PATERSON ALEXANDER M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS7879250B2Feb 1, 2011
Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection
APPLIED MATERIALS INC7 citations83
US7832354B2Nov 16, 2010
Cathode liner with wafer edge gas injection in a plasma reactor chamber
APPLIED MATERIALS INC13 citations83
US8383002B2Feb 26, 2013
Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection
APPLIED MATERIALS INC2 citations62
US8017526B2Sep 13, 2011
Gate profile control through effective frequency of dual HF/VHF sources in a plasma etch process
APPLIED MATERIALS INC1 citations50