Inventor

PAXTON JASON

US2 patents

⚠️ This page may combine multiple inventors who share the name “PAXTON JASON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FOMENKOV IGOR V

1 patent

US8304752B2Nov 6, 2012

EUV light producing system and method utilizing an alignment laser

FOMENKOV IGOR V12 citations82

PARTLO WILLIAM N

1 patent

US8283643B2Oct 9, 2012

Systems and methods for drive laser beam delivery in an EUV light source

PARTLO WILLIAM N12 citations81