Inventor

KATO TAKARA

JP2 patents

Patents

2 patents

US8399353B2Mar 19, 2013

Methods of forming copper wiring and copper film, and film forming system

ISHIZAKA TADAHIRO9 citations82

US8859422B2Oct 14, 2014

Method of forming copper wiring and method and system for forming copper film

ISHIZAKA TADAHIRO3 citations61