Inventor
YASUMURO CHIAKI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “YASUMURO CHIAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEIKO INSTR INC
3 patentsUS6469293B1Oct 22, 2002
Multiprobe and scanning probe microscope
SEIKO INSTR INC28 citations92
US6422069B1Jul 23, 2002
Self-exciting and self-detecting probe and scanning probe apparatus
SEIKO INSTR INC41 citations92
US6664540B2Dec 16, 2003
Microprobe and sample surface measuring apparatus
SEIKO INSTR INC14 citations83
TOKYO ELECTRON LTD
3 patentsUS10309005B2Jun 4, 2019
Deposition device and deposition method
TOKYO ELECTRON LTD3 citations72
US9406557B2Aug 2, 2016
Copper wiring forming method with Ru liner and Cu alloy fill
TOKYO ELECTRON LTD0 citations39
US9253862B2Feb 2, 2016
Plasma processing method and plasma processing apparatus
TOKYO ELECTRON LTD0 citations38