Inventor

MANI RADHIKA

US6 patents

⚠️ This page may combine multiple inventors who share the name “MANI RADHIKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents

US9633846B2Apr 25, 2017

Internal plasma grid applications for semiconductor fabrication

LAM RES CORP8 citations81

US9230819B2Jan 5, 2016

Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processing

LAM RES CORP15 citations81

US10658174B2May 19, 2020

Atomic layer deposition and etch for reducing roughness

LAM RES CORP3 citations68

US11170997B2Nov 9, 2021

Atomic layer deposition and etch for reducing roughness

LAM RES CORP0 citations57

SASANO HIROKI

1 patent

US8133817B2Mar 13, 2012

Shallow trench isolation etch process

SASANO HIROKI7 citations77

MANI RADHIKA

1 patent

US8722547B2May 13, 2014

Etching high K dielectrics with high selectivity to oxide containing layers at elevated temperatures with BC13 based etch chemistries

MANI RADHIKA5 citations67