Inventor
GANI NICOLAS
US13 patents
⚠️ This page may combine multiple inventors who share the name “GANI NICOLAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6818562B2Nov 16, 2004
Method and apparatus for tuning an RF matching network in a plasma enhanced semiconductor wafer processing system
APPLIED MATERIALS INC94 citations97
US7436645B2Oct 14, 2008
Method and apparatus for controlling temperature of a substrate
APPLIED MATERIALS INC37 citations91
US6599437B2Jul 29, 2003
Method of etching organic antireflection coating (ARC) layers
APPLIED MATERIALS INC25 citations91
US9305797B2Apr 5, 2016
Polysilicon over-etch using hydrogen diluted plasma for three-dimensional gate etch
APPLIED MATERIALS INC8 citations79
US6933243B2Aug 23, 2005
High selectivity and residue free process for metal on thin dielectric gate etch application
APPLIED MATERIALS INC8 citations71
US7648914B2Jan 19, 2010
Method for etching having a controlled distribution of process results
APPLIED MATERIALS INC6 citations60
US7910488B2Mar 22, 2011
Alternative method for advanced CMOS logic gate etch applications
APPLIED MATERIALS INC1 citations51