Inventor
HORIGUCHI TAKAHIRO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “HORIGUCHI TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS6537422B2Mar 25, 2003
Single-substrate-heat-processing apparatus for semiconductor process
TOKYO ELECTRON LTD40 citations92
US6402848B1Jun 11, 2002
Single-substrate-treating apparatus for semiconductor processing system
TOKYO ELECTRON LTD48 citations92
US7655111B2Feb 2, 2010
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD11 citations83
US8733281B2May 27, 2014
Plasma processing apparatus
TOKYO ELECTRON LTD5 citations73
US7432468B2Oct 7, 2008
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD8 citations73
US6506257B2Jan 14, 2003
Single-substrate-processing apparatus for semiconductor process
TOKYO ELECTRON LTD10 citations71
US7934468B2May 3, 2011
Plasma processing apparatus and plasma processing method
TOKYO ELECTRON LTD2 citations62
US6719849B2Apr 13, 2004
Single-substrate-processing apparatus for semiconductor process
TOKYO ELECTRON LTD6 citations58
US6660097B2Dec 9, 2003
Single-substrate-processing apparatus for semiconductor process
TOKYO ELECTRON LTD1 citations51
US7771536B2Aug 10, 2010
Substrate processing apparatus
TOKYO ELECTRON LTD0 citations38