Inventor
FUKUNAGA NOBUTAKA
JP6 patents
⚠️ This page may combine multiple inventors who share the name “FUKUNAGA NOBUTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS12290898B2May 6, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD1 citations62
US10274843B2Apr 30, 2019
Exposure apparatus, exposure method and storage medium
TOKYO ELECTRON LTD1 citations57
US12194594B2Jan 14, 2025
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US12377519B2Aug 5, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations38
US10527948B2Jan 7, 2020
Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium
TOKYO ELECTRON LTD0 citations38