Inventor

SOHARA TOSHIFUMI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “SOHARA TOSHIFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US7676296B2Mar 9, 2010

Substrate processing system, substrate processing method and computer-readable storage medium storing verification program

TOKYO ELECTRON LTD5 citations57

SEKI SHINICHI

1 patent

US8774491B2Jul 8, 2014

Substrate processing apparatus, substrate processing method, and computer-readable recording medium having program for executing the substrate processing method recorded therein

SEKI SHINICHI2 citations51