Inventor
QI BO
US29 patents
⚠️ This page may combine multiple inventors who share the name “QI BO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
23 patentsUS10886140B2Jan 5, 2021
3D NAND etch
APPLIED MATERIALS INC9 citations84
US11545354B2Jan 3, 2023
Molecular layer deposition method and system
APPLIED MATERIALS INC3 citations68
US12482646B2Nov 25, 2025
Processes for depositing SiB films
APPLIED MATERIALS INC0 citations62
US12198936B2Jan 14, 2025
Defect free germanium oxide gap fill
APPLIED MATERIALS INC0 citations62
US12018364B2Jun 25, 2024
Super-conformal germanium oxide films
APPLIED MATERIALS INC0 citations62
US11830729B2Nov 28, 2023
Low-k boron carbonitride films
APPLIED MATERIALS INC0 citations62
US11791155B2Oct 17, 2023
Diffusion barriers for germanium
APPLIED MATERIALS INC0 citations62
US11781218B2Oct 10, 2023
Defect free germanium oxide gap fill
APPLIED MATERIALS INC0 citations62
US11732352B2Aug 22, 2023
Hydrogen free silicon dioxide
APPLIED MATERIALS INC0 citations62
US11355354B1Jun 7, 2022
Thermal deposition of doped silicon oxide
APPLIED MATERIALS INC0 citations62
US12033848B2Jul 9, 2024
Processes for depositing sib films
APPLIED MATERIALS INC0 citations61
US11658026B2May 23, 2023
Conformal silicon oxide film deposition
APPLIED MATERIALS INC0 citations61
US11655537B2May 23, 2023
HDP sacrificial carbon gapfill
APPLIED MATERIALS INC0 citations61
US11626278B2Apr 11, 2023
Catalytic formation of boron and carbon films
APPLIED MATERIALS INC0 citations61
US11515170B2Nov 29, 2022
3D NAND etch
APPLIED MATERIALS INC0 citations61
US12027374B2Jul 2, 2024
Processes to deposit amorphous-silicon etch protection liner
APPLIED MATERIALS INC0 citations60
US11495454B2Nov 8, 2022
Deposition of low-stress boron-containing layers
APPLIED MATERIALS INC0 citations60
US11404263B2Aug 2, 2022
Deposition of low-stress carbon-containing layers
APPLIED MATERIALS INC0 citations60
US11276573B2Mar 15, 2022
Methods of forming high boron-content hard mask materials
APPLIED MATERIALS INC0 citations58
US11859278B2Jan 2, 2024
Molecular layer deposition of amorphous carbon films
APPLIED MATERIALS INC0 citations54
US11682554B2Jun 20, 2023
Catalytic thermal deposition of carbon-containing materials
APPLIED MATERIALS INC0 citations51
US11676813B2Jun 13, 2023
Doping semiconductor films
APPLIED MATERIALS INC0 citations51
US11702751B2Jul 18, 2023
Non-conformal high selectivity film for etch critical dimension control
APPLIED MATERIALS INC0 citations50