Inventor

CHENG RUI

US77 patents

⚠️ This page may combine multiple inventors who share the name “CHENG RUI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHENG RUI

APPLIED MATERIALS INC

Thermal silicon etch

Seam healing using high pressure anneal

3D NAND etch

Two-step process for gapfilling high aspect ratio trenches with amorphous silicon film

Methods for gapfill in high aspect ratio structures

Method for Si gap fill by PECVD

Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing

Pre-treatment approach to improve continuity of ultra-thin amorphous silicon film on silicon oxide

PECVD tungsten containing hardmask films and methods of making

Cyclic conformal deposition/anneal/etch for Si gapfill

Treatment approach to improve film roughness by improving nucleation/adhesion of silicon oxide

Hybrid carbon hardmask for lateral hardmask recess reduction

Plasma treatment to improve adhesion between hardmask film and silicon oxide film

Conformal doping in 3D si structure using conformal dopant deposition

Deposition of metal doped amorphous carbon film

Plasma enhanced deposition of silicon-containing films at low temperature

Borane mediated dehydrogenation process from silane and alkylsilane species for spacer and hardmask application

Multiple spacer patterning schemes

Method for Si gap fill by PECVD

Selective deposition of silicon using deposition-treat-etch process

Methods for conformal doping of three dimensional structures

Conformal doped amorphous silicon as nucleation layer for metal deposition

Bottom-up growth of silicon oxide and silicon nitride using sequential deposition-etch-treat processing

Selective deposition of silicon using deposition-treat-etch process

Thermal silicon etch

Processes for depositing SiB films

Systems and methods for substrate support temperature control

Remote capacitively coupled plasma deposition of amorphous silicon

Boron concentration tunability in boron-silicon films

Method for forming and patterning a layer and/or substrate

Metal-doped boron films

Systems and methods for substrate support temperature control

Boron concentration tunability in boron-silicon films

Apparatus and methods for improving thermal chemical vapor deposition (CVD) uniformity

Conformal high concentration boron doping of semiconductors

PECVD tungsten containing hardmask films and methods of making

Methods for gapfill in high aspect ratio structures

Film formation via pulsed RF plasma

Conformal high concentration boron doping of semiconductors

Method for forming and patterning a layer and/or substrate

Hybrid carbon hardmask for lateral hardmask recess reduction

Processes for depositing sib films

3D NAND etch

Polysilicon liners

Controlling concentration profiles for deposited films using machine learning

Ion implantation for reduced hydrogen incorporation in amorphous silicon

CHENG RUI

Folding wagon

Collapsible wagon

Foldable cart

NAT OILWELL VARCO LP

Method and apparatus for erecting a drilling rig