Inventor
WANG HUIYUAN
US14 patents
⚠️ This page may combine multiple inventors who share the name “WANG HUIYUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS10886140B2Jan 5, 2021
3D NAND etch
APPLIED MATERIALS INC9 citations84
US12198936B2Jan 14, 2025
Defect free germanium oxide gap fill
APPLIED MATERIALS INC0 citations62
US12018364B2Jun 25, 2024
Super-conformal germanium oxide films
APPLIED MATERIALS INC0 citations62
US11791155B2Oct 17, 2023
Diffusion barriers for germanium
APPLIED MATERIALS INC0 citations62
US11781218B2Oct 10, 2023
Defect free germanium oxide gap fill
APPLIED MATERIALS INC0 citations62
US11830734B2Nov 28, 2023
Thermal deposition of silicon-germanium
APPLIED MATERIALS INC0 citations61
US11515170B2Nov 29, 2022
3D NAND etch
APPLIED MATERIALS INC0 citations61
US11495454B2Nov 8, 2022
Deposition of low-stress boron-containing layers
APPLIED MATERIALS INC0 citations60
US11404263B2Aug 2, 2022
Deposition of low-stress carbon-containing layers
APPLIED MATERIALS INC0 citations60
US12046468B2Jul 23, 2024
Conformal silicon-germanium film deposition
APPLIED MATERIALS INC0 citations51
US11702751B2Jul 18, 2023
Non-conformal high selectivity film for etch critical dimension control
APPLIED MATERIALS INC0 citations50