Inventor
MEKOTA MIRKO
DE3 patents
Patents
3 patentsUS9869319B2Jan 16, 2018
Vacuum pump
PFEIFFER VACUUM GMBH4 citations64
US9909592B2Mar 6, 2018
Vacuum pump
PFEIFFER VACUUM GMBH0 citations35
US9784284B2Oct 10, 2017
Stator element for a holweck pump stage, vacuum pump having a holweck pump stage and method of manufacturing a stator element for a holweck pump stage
PFEIFFER VACUUM GMBH0 citations35