Inventor
IWATANI SATOSHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “IWATANI SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
5 patentsUS9977347B2May 22, 2018
Positioning apparatus, lithography apparatus, and method of manufacturing article
CANON KK3 citations71
US11543745B2Jan 3, 2023
Stage driving apparatus, lithography apparatus, and method of manufacturing article
CANON KK0 citations56
US12044962B2Jul 23, 2024
Forming apparatus, forming method, and article manufacturing method
CANON KK0 citations50
US12386274B2Aug 12, 2025
Stage device, lithography apparatus, and article manufacturing method
CANON KK0 citations46
US10185226B2Jan 22, 2019
Stage apparatus, lithography apparatus, and method of manufacturing article
CANON KK0 citations35