Inventor
YANG SHIH-HAO
TW10 patents
⚠️ This page may combine multiple inventors who share the name “YANG SHIH-HAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
9 patentsUS11662656B2May 30, 2023
Mask and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations70
US10845698B2Nov 24, 2020
Mask, method of forming the same and method of manufacturing a semiconductor device using the same
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations70
US9373551B2Jun 21, 2016
Moveable and adjustable gas injectors for an etching chamber
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations69
US12066757B2Aug 20, 2024
Mask and method of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11086211B2Aug 10, 2021
Masks and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10852634B2Dec 1, 2020
Phase shifter mask
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10345692B2Jul 9, 2019
Photomask and a fabrication method therefor
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10157805B2Dec 18, 2018
Moveable and adjustable gas injectors for an etching chamber
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US12505987B2Dec 23, 2025
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations44