Inventor
GUAN TIANNAN
NL4 patents
Patents
4 patentsUS10192772B2Jan 29, 2019
Substrate table and lithographic apparatus
ASML NETHERLANDS BV4 citations69
US12189309B2Jan 7, 2025
Clamp assembly
ASML NETHERLANDS BV0 citations58
US10451981B2Oct 22, 2019
Measurement substrate, a measurement method and a measurement system
ASML NETHERLANDS BV0 citations48
US10551182B2Feb 4, 2020
Proximity sensor, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations27