Inventor
MAYR LUKAS
DE7 patents
Patents
7 patentsUS11505562B2Nov 22, 2022
Process for the generation of metal-containing films
BASF SE4 citations68
US11319332B2May 3, 2022
Process for the generation of metal-containing films
BASF SE2 citations68
US11377454B2Jul 5, 2022
Aluminum precursor and process for the generation of metal-containing films
BASF SE0 citations58
US11655262B2May 23, 2023
Process for the generation of metal-containing films
BASF SE0 citations57
US12492475B2Dec 9, 2025
Process for the generation of metal- or semimetal-containing films
BASF SE0 citations56
US11149349B2Oct 19, 2021
Process for the generation of thin silicon-containing films
BASF SE0 citations53
US11505865B2Nov 22, 2022
Process for the generation of metal- or semimetal-containing films
BASF SE0 citations42