Inventor
KEMPEN ANTONIUS THEODORUS WILHELMUS
NL18 patents
⚠️ This page may combine multiple inventors who share the name “KEMPEN ANTONIUS THEODORUS WILHELMUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS11340532B2May 24, 2022
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV5 citations79
US9442380B2Sep 13, 2016
Method and apparatus for generating radiation
ASML NETHERLANDS BV4 citations71
US9983482B2May 29, 2018
Radiation collector, radiation source and lithographic apparatus
ASML NETHERLANDS BV2 citations70
US7667820B2Feb 23, 2010
Method for chemical reduction of an oxidized contamination material, or reducing oxidation of a contamination material and a conditioning system for doing the same
ASML NETHERLANDS BV5 citations61
US11846887B2Dec 19, 2023
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV1 citations57
US12099306B2Sep 24, 2024
Method for controlling a lithographic system
ASML NETHERLANDS BV0 citations51
US9462667B2Oct 4, 2016
Radiation source and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US9510432B2Nov 29, 2016
Radiation source and lithographic apparatus
ASML NETHERLANDS BV0 citations50
US9860966B2Jan 2, 2018
Radiation source
ASML NETHERLANDS BV0 citations48
KEMPEN ANTONIUS THEODORUS WILHELMUS
4 patentsUS8685632B2Apr 1, 2014
Radiation source, lithographic apparatus and device manufacturing method
KEMPEN ANTONIUS THEODORUS WILHELMUS1 citations50
US9164403B2Oct 20, 2015
Radiation source, lithographic apparatus and device manufacturing method
KEMPEN ANTONIUS THEODORUS WILHELMUS1 citations49
US9119280B2Aug 25, 2015
Radiation source
KEMPEN ANTONIUS THEODORUS WILHELMUS1 citations49
US9192039B2Nov 17, 2015
Radiation source
KEMPEN ANTONIUS THEODORUS WILHELMUS0 citations42