Inventor

VAN DE WIEL HUBERTUS JOHANNES

NL3 patents

⚠️ This page may combine multiple inventors who share the name “VAN DE WIEL HUBERTUS JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US11340532B2May 24, 2022

Prolonging optical element lifetime in an EUV lithography system

ASML NETHERLANDS BV5 citations79

US11846887B2Dec 19, 2023

Prolonging optical element lifetime in an EUV lithography system

ASML NETHERLANDS BV1 citations57

KEMPEN ANTONIUS THEODORUS WILHELMUS

1 patent

US9192039B2Nov 17, 2015

Radiation source

KEMPEN ANTONIUS THEODORUS WILHELMUS0 citations42