Inventor

WIEGGERS ROB CARLO

NL2 patents

Patents

2 patents

US11340532B2May 24, 2022

Prolonging optical element lifetime in an EUV lithography system

ASML NETHERLANDS BV5 citations79

US11846887B2Dec 19, 2023

Prolonging optical element lifetime in an EUV lithography system

ASML NETHERLANDS BV1 citations57