Inventor
ZHU QIUSHI
US3 patents
Patents
3 patentsUS11340532B2May 24, 2022
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV5 citations79
US11846887B2Dec 19, 2023
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV1 citations57
US12287455B2Apr 29, 2025
Oxygen-loss resistant top coating for optical elements
ASML NETHERLANDS BV0 citations56