Inventor

YAGHOOBI PARHAM

NL3 patents

⚠️ This page may combine multiple inventors who share the name “YAGHOOBI PARHAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US11340532B2May 24, 2022

Prolonging optical element lifetime in an EUV lithography system

ASML NETHERLANDS BV5 citations79

US11846887B2Dec 19, 2023

Prolonging optical element lifetime in an EUV lithography system

ASML NETHERLANDS BV1 citations57

ASML HOLDING NV

1 patent

US12332570B2Jun 17, 2025

Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris

ASML HOLDING NV0 citations54