Inventor
KUZNETSOV ALEXEY SERGEEVICH
NL5 patents
Patents
5 patentsUS10228615B2Mar 12, 2019
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
ASML NETHERLANDS BV17 citations93
US11340532B2May 24, 2022
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV5 citations79
US9773578B2Sep 26, 2017
Radiation source-collector and method for manufacture
ASML NETHERLANDS BV3 citations69
US11846887B2Dec 19, 2023
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV1 citations57
US12072620B2Aug 27, 2024
Method of manufacturing a membrane assembly
ASML NETHERLANDS BV0 citations48