Inventor
LEE MIN GUN
KR3 patents
Patents
3 patentsUS11787974B2Oct 17, 2023
Chemical-mechanical polishing particle and polishing slurry composition comprising same
DONGJIN SEMICHEM CO LTD0 citations51
US11001732B2May 11, 2021
Polishing slurry composition
DONGJIN SEMICHEM CO LTD0 citations48
US7307259B2Dec 11, 2007
System and method for controlling composition for lithography process in real time using near infrared spectrometer
DONGJIN SEMICHEM CO LTD0 citations37