Inventor
ICHIMURA KEITA
JP5 patents
Patents
5 patentsUS10453720B1Oct 22, 2019
Method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP3 citations72
US11289350B2Mar 29, 2022
Method of manufacturing semiconductor device
KOKUSAI ELECTRIC CORP1 citations61
US12451375B2Oct 21, 2025
Substrate processing apparatus, method of manufacturing semiconductor device and method of processing substrate support
KOKUSAI ELECTRIC CORP0 citations59
US12040161B2Jul 16, 2024
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations58
US12575347B2Mar 10, 2026
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
KOKUSAI ELECTRIC CORP0 citations48