Inventor
BLACKWOOD ROBERT S
8 patents
⚠️ This page may combine multiple inventors who share the name “BLACKWOOD ROBERT S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI CORP
4 patentsUS4132567AJan 2, 1979
Apparatus for and method of cleaning and removing static charges from substrates
FSI CORP202 citations97
US4749440AJun 7, 1988
Gaseous process and apparatus for removing films from substrates
FSI CORP633 citations96
US4286541ASep 1, 1981
Applying photoresist onto silicon wafers
FSI CORP77 citations95
US4197000AApr 8, 1980
Positive developing method and apparatus
FSI CORP104 citations95