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Inventor
IWATA NAOHIKO
JP
5 patents
⚠️ This page may combine multiple inventors who share the name “IWATA NAOHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
3 patents
US5327718A
Jul 12, 1994
Gas turbine apparatus and method of control thereof
HITACHI LTD
75 citations
95
US4500865A
Feb 19, 1985
Fluid leakage detecting element
HITACHI LTD
28 citations
92
US5119859A
Jun 9, 1992
Steam governing valve
HITACHI LTD
9 citations
69
NIKON CORP
2 patents
US5877843A
Mar 2, 1999
Exposure apparatus
NIKON CORP
113 citations
94
US7397534B2
Jul 8, 2008
Exposure apparatus and device manufacturing method
NIKON CORP
4 citations
61