Inventor

BERGE RUNE

SE5 patents

⚠️ This page may combine multiple inventors who share the name “BERGE RUNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ABB RESEARCH LTD

2 patents

US5695567ADec 9, 1997

Susceptor for a device for epitaxially growing objects and such a device

ABB RESEARCH LTD589 citations96

US5674320AOct 7, 1997

Susceptor for a device for epitaxially growing objects and such a device

ABB RESEARCH LTD36 citations90

AIXTRON AG

2 patents

US7048802B2May 23, 2006

CVD reactor with graphite-foam insulated, tubular susceptor

AIXTRON AG17 citations81

US6811614B2Nov 2, 2004

CVD reactor with substrate holder which is rotatably driven and mounted by a gas stream

AIXTRON AG18 citations81

KORDINA OLOF CLAES ERIK

1 patent

US8430965B2Apr 30, 2013

Epitaxial growth system for fast heating and cooling

KORDINA OLOF CLAES ERIK11 citations79