Inventor
DOERING KENNETH
US4 patents
Patents
4 patentsUS6174377B1Jan 16, 2001
Processing chamber for atomic layer deposition processes
GENUS INC639 citations98
US6387185B2May 14, 2002
Processing chamber for atomic layer deposition processes
GENUS INC123 citations97
US5855675AJan 5, 1999
Multipurpose processing chamber for chemical vapor deposition processes
GENUS INC230 citations97
US6818067B2Nov 16, 2004
Processing chamber for atomic layer deposition processes
GENUS INC75 citations96