P

Inventor

GALEWSKI CARL J

US9 patents
⚠️ This page may combine multiple inventors who share the name “GALEWSKI CARL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GENUS INC

7 patents
US6540838B2Apr 1, 2003

Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition

GENUS INC447 citations98
US6451119B2Sep 17, 2002

Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition

GENUS INC341 citations98
US6305314B1Oct 23, 2001

Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition

GENUS INC487 citations98
US6174377B1Jan 16, 2001

Processing chamber for atomic layer deposition processes

GENUS INC639 citations98
US6387185B2May 14, 2002

Processing chamber for atomic layer deposition processes

GENUS INC123 citations97
US5855675AJan 5, 1999

Multipurpose processing chamber for chemical vapor deposition processes

GENUS INC230 citations97
US6818067B2Nov 16, 2004

Processing chamber for atomic layer deposition processes

GENUS INC75 citations96

ADVANCED MICRO DEVICES INC

1 patent
US6479902B1Nov 12, 2002

Semiconductor catalytic layer and atomic layer deposition thereof

ADVANCED MICRO DEVICES INC85 citations97

(unassigned)

1 patent
US6635570B1Oct 21, 2003

PECVD and CVD processes for WNx deposition

13 citations74