Inventor
MURRAY MARK P
US7 patents
Patents
7 patentsUS6436814B1Aug 20, 2002
Interconnection structure and method for fabricating same
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US6221775B1Apr 24, 2001
Combined chemical mechanical polishing and reactive ion etching process
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US6982227B2Jan 3, 2006
Single and multilevel rework
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US6674168B1Jan 6, 2004
Single and multilevel rework
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US6426558B1Jul 30, 2002
Metallurgy for semiconductor devices
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US7052625B2May 30, 2006
Slurry and use thereof for polishing
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US6653737B2Nov 25, 2003
Interconnection structure and method for fabricating same
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