Inventor

THOMPSON HEIKE

US4 patents

⚠️ This page may combine multiple inventors who share the name “THOMPSON HEIKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

2 patents

US6582777B1Jun 24, 2003

Electron beam modification of CVD deposited low dielectric constant materials

APPLIED MATERIALS INC115 citations96

US7309514B2Dec 18, 2007

Electron beam modification of CVD deposited films, forming low dielectric constant materials

APPLIED MATERIALS INC1 citations50

ELECTRON VISION CORP

2 patents

US6607991B1Aug 19, 2003

Method for curing spin-on dielectric films utilizing electron beam radiation

ELECTRON VISION CORP63 citations92

US6426127B1Jul 30, 2002

Electron beam modification of perhydrosilazane spin-on glass

ELECTRON VISION CORP37 citations90