Inventor
GOECKNER MATTHEW J
US6 patents
⚠️ This page may combine multiple inventors who share the name “GOECKNER MATTHEW J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
5 patentsUS6182604B1Feb 6, 2001
Hollow cathode for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT133 citations98
US6335536B1Jan 1, 2002
Method and apparatus for low voltage plasma doping using dual pulses
VARIAN SEMICONDUCTOR EQUIPMENT101 citations97
US6433553B1Aug 13, 2002
Method and apparatus for eliminating displacement current from current measurements in a plasma processing system
VARIAN SEMICONDUCTOR EQUIPMENT85 citations94
US6527918B2Mar 4, 2003
Method and apparatus for low voltage plasma doping using dual pulses
VARIAN SEMICONDUCTOR EQUIPMENT23 citations92
US6500496B1Dec 31, 2002
Hollow cathode for plasma doping system
VARIAN SEMICONDUCTOR EQUIPMENT20 citations92