Inventor
NAKAMURA YUKINORI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMURA YUKINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NGK INSULATORS LTD
17 patentsUS6426519B1Jul 30, 2002
Epitaxial growth substrate and a method for producing the same
NGK INSULATORS LTD59 citations96
US6342748B1Jan 29, 2002
Surface acoustic wave device, substrate therefor and method of manufacturing the substrate
NGK INSULATORS LTD24 citations92
US5936329AAug 10, 1999
Surface acoustic wave device, substrate therefor, and method of manufacturing the substrate
NGK INSULATORS LTD29 citations92
US7303789B2Dec 4, 2007
Methods for producing thin films on substrates by plasma CVD
NGK INSULATORS LTD37 citations91
US7955437B2Jun 7, 2011
Apparatus for fabricating a III-V nitride film
NGK INSULATORS LTD8 citations84
US6989202B2Jan 24, 2006
Method for fabricating a III nitride film, an underlayer for fabricating a III nitride film and a method for fabricating the same underlayer
NGK INSULATORS LTD13 citations84
US6183555B1Feb 6, 2001
Surface acoustic wave device, substrate therefor, and method of manufacturing the substrate
NGK INSULATORS LTD16 citations84
US7883750B2Feb 8, 2011
Thin films and a method for producing the same
NGK INSULATORS LTD7 citations83
US6709703B2Mar 23, 2004
Method for fabricating a III-V nitride film and an apparatus for fabricating the same
NGK INSULATORS LTD9 citations74
US6649493B2Nov 18, 2003
Method for fabricating a III nitride film, and underlayer for fabricating a III nitride film and a method for fabricating the same underlayer
NGK INSULATORS LTD11 citations74
US6554896B1Apr 29, 2003
Epitaxial growth substrate and a method for producing the same
NGK INSULATORS LTD7 citations74
US6759715B2Jul 6, 2004
Epitaxial base substrate and epitaxial substrate
NGK INSULATORS LTD4 citations63
US6623877B2Sep 23, 2003
III nitride epitaxial wafer and usage of the same
NGK INSULATORS LTD4 citations63
US7067847B2Jun 27, 2006
Semiconductor element
NGK INSULATORS LTD1 citations52
US6815867B2Nov 9, 2004
Substrate usable for an acoustic surface wave device, a method for fabricating the same substrate and an acoustic surface wave device having the same substrate
NGK INSULATORS LTD0 citations52
US6727164B2Apr 27, 2004
Method for fabricating a semiconducting nitride film, susceptor tray, and apparatus for fabricating a semiconducting nitride film
NGK INSULATORS LTD1 citations52
US6649288B2Nov 18, 2003
Nitride film
NGK INSULATORS LTD1 citations52